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A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:

  • Large travel
  • High precision
  • Fast switching
  • Low power consumption
  • Power free force sustainability

For microactuator, there are two in addition

Principle of microactuators

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The basic principle can be described as the expression for mechanical work

since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

Classes of microactuators

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Sources:[1][2][3][4]

See also

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References

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  1. ^ Fujita, Hiroyuki; Toshiyoshi, Hiroshi (1998). "Micro actuators and their applications". Microelectronics Journal. 29 (9): 637–640. doi:10.1016/S0026-2692(98)00027-5.
  2. ^ Wood, D.; Burdess, J. S.; Harris, A. J. (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110): 7/1–7/3. doi:10.1049/ic:19960698.
  3. ^ Ma, Z. C.; Fan, J.; Wang, H.; Chen, W.; Yang, G. Z.; Han, B. (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small. 19 (22). doi:10.1002/smll.202300469. PMID 36855777.
  4. ^ Yoshida, K.; Park, J. H.; Yano, H.; Yokota, S.; Yun, S. (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid" (PDF). Sensors and Materials. 17 (3): 97–112.

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Wax motor

cools and solidifies, allowing the vents to close again. A paraffin microactuator is a type of wax motor, often fabricated by microelectromechanical systems

Projection micro-stereolithography

material elements in a single process. Applications include fabricating microactuators, creating molds, electroplating or (with resin additives) ceramic items

Actuator

quality. End effector Hard disk drive actuator Linear actuator Load cell Microactuator Nanotube nanomotor Robot actuators Torque motor Escudier, Marcel; Atkins

Heparin mimicking polymers

Microactuator (right) is a prototype endovascular electromechanical clot-extraction device. This device consists of electromechanical microactuator mounted

Paraffin wax

Wax-pellet thermostat United States Patent 4948043 Bodén, Roger. "Paraffin Microactuator" (PDF). Materials Science Sensors and Actuators. University of Uppsala

Mark G. Allen

Singh Center for Nanotechnology. He also leads Penn's Microsensor and Microactuator Research Group. Allen is a co-founder of CardioMEMS, which developed

Miniaturization

Amitabha; Corves, Burkhard (2015). Introduction to Micromechanisms and Microactuators. Heidelberg: Springer. p. 32. ISBN 9788132221432. Huff, Howard; Riordan

Microvalve

be an integrated magnetic, electrostatic, piezoelectric or thermal microactuator, a "smart" phase change, e.g. Shape-memory alloy, or rheological material